Influence of the film thickness on the optical and electrical properties of ITO

M. K. Fung; K. Y. Cheung; Y. C. Sun; A. B. Djurišić; W. K. Chan

Influence of the film thickness on the optical and electrical properties of ITO

M. K. Fung
, K. Y. Cheung
, Y. C. Sun
, A. B. Djurišić
, W. K. Chan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting diodes, organic photovoltaic devices and liquid crystal displays due to its high transparency and electrical conductivity. Since there is a trade-off between the conductivity and transparency of ITO, it is necessary to optimize performances of opto-electronic products by balancing the sheet resistance and transmittance. Both sheet resistance and transmittance are affected by a number of factors such as working temperature, working pressure, oxygen-to-argon ratio during the fabricating process, and thickness. In our study, ITO thin films were deposited on glass substrates by dc sputtering. Effects of ITO with different thicknesses, sheet resistances, and transmission spectra on the performance of bulk heterojunction photovoltaic devices were investigated.

Original language	English
Title of host publication	Organic Materials and Devices for Sustainable Energy Systems
Pages	103-108
Number of pages	6
Publication status	Published - 2010
Externally published	Yes
Event	2009 MRS Fall Meeting - Boston, MA, United States Duration: 29 Nov 2009 → 3 Dec 2009

Publication series

Name	Materials Research Society Symposium Proceedings
Volume	1212
ISSN (Print)	0272-9172

Conference

Conference	2009 MRS Fall Meeting
Country/Territory	United States
City	Boston, MA
Period	29/11/09 → 3/12/09

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Cite this

@inproceedings{a1dcdebdb48349c99cfe919060ad7eec,

title = "Influence of the film thickness on the optical and electrical properties of ITO",

abstract = "Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting diodes, organic photovoltaic devices and liquid crystal displays due to its high transparency and electrical conductivity. Since there is a trade-off between the conductivity and transparency of ITO, it is necessary to optimize performances of opto-electronic products by balancing the sheet resistance and transmittance. Both sheet resistance and transmittance are affected by a number of factors such as working temperature, working pressure, oxygen-to-argon ratio during the fabricating process, and thickness. In our study, ITO thin films were deposited on glass substrates by dc sputtering. Effects of ITO with different thicknesses, sheet resistances, and transmission spectra on the performance of bulk heterojunction photovoltaic devices were investigated.",

author = "Fung, \{M. K.\} and Cheung, \{K. Y.\} and Sun, \{Y. C.\} and Djuri{\v s}i{\'c}, \{A. B.\} and Chan, \{W. K.\}",

year = "2010",

language = "English",

isbn = "9781605111858",

series = "Materials Research Society Symposium Proceedings",

pages = "103--108",

booktitle = "Organic Materials and Devices for Sustainable Energy Systems",

note = "2009 MRS Fall Meeting ; Conference date: 29-11-2009 Through 03-12-2009",

}

Influence of the film thickness on the optical and electrical properties of ITO. / Fung, M. K.; Cheung, K. Y.; Sun, Y. C. et al.
Organic Materials and Devices for Sustainable Energy Systems. 2010. p. 103-108 (Materials Research Society Symposium Proceedings; Vol. 1212).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Influence of the film thickness on the optical and electrical properties of ITO

AU - Fung, M. K.

AU - Cheung, K. Y.

AU - Sun, Y. C.

AU - Djurišić, A. B.

AU - Chan, W. K.

PY - 2010

Y1 - 2010

N2 - Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting diodes, organic photovoltaic devices and liquid crystal displays due to its high transparency and electrical conductivity. Since there is a trade-off between the conductivity and transparency of ITO, it is necessary to optimize performances of opto-electronic products by balancing the sheet resistance and transmittance. Both sheet resistance and transmittance are affected by a number of factors such as working temperature, working pressure, oxygen-to-argon ratio during the fabricating process, and thickness. In our study, ITO thin films were deposited on glass substrates by dc sputtering. Effects of ITO with different thicknesses, sheet resistances, and transmission spectra on the performance of bulk heterojunction photovoltaic devices were investigated.

AB - Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting diodes, organic photovoltaic devices and liquid crystal displays due to its high transparency and electrical conductivity. Since there is a trade-off between the conductivity and transparency of ITO, it is necessary to optimize performances of opto-electronic products by balancing the sheet resistance and transmittance. Both sheet resistance and transmittance are affected by a number of factors such as working temperature, working pressure, oxygen-to-argon ratio during the fabricating process, and thickness. In our study, ITO thin films were deposited on glass substrates by dc sputtering. Effects of ITO with different thicknesses, sheet resistances, and transmission spectra on the performance of bulk heterojunction photovoltaic devices were investigated.

UR - https://www.scopus.com/pages/publications/78650407783

M3 - Conference contribution

AN - SCOPUS:78650407783

SN - 9781605111858

T3 - Materials Research Society Symposium Proceedings

SP - 103

EP - 108

BT - Organic Materials and Devices for Sustainable Energy Systems

T2 - 2009 MRS Fall Meeting

Y2 - 29 November 2009 through 3 December 2009

ER -

Influence of the film thickness on the optical and electrical properties of ITO

Abstract

Publication series

Conference

UN SDGs

Other files and links

Fingerprint

Cite this