Influence of the film thickness on the optical and electrical properties of ITO

M. K. Fung, K. Y. Cheung, Y. C. Sun, A. B. Djurišić, W. K. Chan

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


Indium tin oxide (ITO) is widely used for opto-electronic products such as organic light-emitting diodes, organic photovoltaic devices and liquid crystal displays due to its high transparency and electrical conductivity. Since there is a trade-off between the conductivity and transparency of ITO, it is necessary to optimize performances of opto-electronic products by balancing the sheet resistance and transmittance. Both sheet resistance and transmittance are affected by a number of factors such as working temperature, working pressure, oxygen-to-argon ratio during the fabricating process, and thickness. In our study, ITO thin films were deposited on glass substrates by dc sputtering. Effects of ITO with different thicknesses, sheet resistances, and transmission spectra on the performance of bulk heterojunction photovoltaic devices were investigated.

Original languageEnglish
Title of host publicationOrganic Materials and Devices for Sustainable Energy Systems
Number of pages6
Publication statusPublished - 2010
Externally publishedYes
Event2009 MRS Fall Meeting - Boston, MA, United States
Duration: 29 Nov 20093 Dec 2009

Publication series

NameMaterials Research Society Symposium Proceedings
ISSN (Print)0272-9172


Conference2009 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA


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