Indium tin oxide nanorods by dc sputtering

M. K. Fung, Y. C. Sun, A. M.C. Ng, A. B. Djurišić, W. K. Chan

Research output: Contribution to journalArticlepeer-review

8 Citations (Scopus)

Abstract

Growth of indium tin oxide (ITO) nanorods by sputtering without any use of templates or oblique angle deposition has been achieved. The morphology, optical and electrical properties of ITO nanorods obtained under different deposition conditions have been characterized. The deposition conditions resulting in high transmission and low sheet resistance have been determined. Dense ITO nanorod array has potential for application as a contact in light-emitting diodes.

Original languageEnglish
Pages (from-to)594-597
Number of pages4
JournalCurrent Applied Physics
Volume11
Issue number3
DOIs
Publication statusPublished - May 2011
Externally publishedYes

Keywords

  • Indium tin oxide
  • Nanostructures
  • Oxides

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