Abstract
An analytical two-dimensional model is developed to explain the minority-carrier exclusion effect in circular spreading-resistance temperature (SRT) sensor fabricated on thin silicon film. The model can be used to show the relation between minority-carrier exclusion length and maximum operating temperature of the sensor under different bias currents and different doping levels. Comparison is made between the proposed model and the conventional one-dimensional model used for similar sensors with rectangular shape. Experimental results show that the new model is more accurate than the one-dimensional model for predicting the characteristics of the circular SRT sensor.
Original language | English |
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Pages (from-to) | 25-30 |
Number of pages | 6 |
Journal | Solid-State Electronics |
Volume | 49 |
Issue number | 1 |
DOIs | |
Publication status | Published - Jan 2005 |
Keywords
- Minority-carrier exclusion
- Silicon film
- Temperature sensor
- Two-dimensional model