An analytical two-dimensional model for circular spreading-resistance temperature sensor based on thin silicon film

Z. H. Wu, P. T. Lai, Bin Li, P. C.K. Kwok, B. Y. Liu, X. R. Zheng

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

An analytical two-dimensional model is developed to explain the minority-carrier exclusion effect in circular spreading-resistance temperature (SRT) sensor fabricated on thin silicon film. The model can be used to show the relation between minority-carrier exclusion length and maximum operating temperature of the sensor under different bias currents and different doping levels. Comparison is made between the proposed model and the conventional one-dimensional model used for similar sensors with rectangular shape. Experimental results show that the new model is more accurate than the one-dimensional model for predicting the characteristics of the circular SRT sensor.

Original languageEnglish
Pages (from-to)25-30
Number of pages6
JournalSolid-State Electronics
Volume49
Issue number1
DOIs
Publication statusPublished - Jan 2005

Keywords

  • Minority-carrier exclusion
  • Silicon film
  • Temperature sensor
  • Two-dimensional model

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