@inproceedings{967e50b3406741b69b2e3bbcc7782c4e,
title = "A Review of Compliance Design for Semiconductor Fabrication Equipment",
abstract = "In order to fulfill a great demand of IoT and 5G technology, more and more Semiconductor Fabrication Equipment (SFE) have been manufactured. The fastest and most accurate machinery have been launched to the semiconductor industry. Without stringent and smart manufacturing consideration, it would lead the customers' safety risk. This review article introduces the newest European Union (EU) and United States (US) regulatory requirement and propose a detail compliant design rationale for SFE manufacturer. This article is a comprehensive tool for designer to understand the compliance design solution and implementation measures.",
keywords = "Compliance Design, Designers, Electromagnetic Compatibility, Manufacturing, Risk, Safety, Semiconductor Fabrication Equipment",
author = "George Chan and Lee, \{Chi Chung\} and Yang Wei and Tsang, \{Kim Fung\}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 IEEE International Symposium on Product Compliance Engineering-Asia, ISPCE-ASIA 2021 ; Conference date: 30-11-2021 Through 01-12-2021",
year = "2021",
doi = "10.1109/ISPCE-ASIA53453.2021.9652192",
language = "English",
series = "ISPCE-ASIA 2021 - IEEE International Symposium on Product Compliance Engineering-Asia, Proceeding",
booktitle = "ISPCE-ASIA 2021 - IEEE International Symposium on Product Compliance Engineering-Asia, Proceeding",
}